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8 de nov. de 2018 · In this paper, we propose a successful fabrication method for a bipolar electrostatic chuck (ESC) device with a beam-array assembly, in order to achieve a fairly flat surface on the beam’s tip. A fabricated bipolar ESC device is expected to clamp a curved dielectric object due to its elastically-deformable beams, which are compliant with an object’s surface.
1 de abr. de 2020 · Prior to that, the performances of mono-polar and bi-polar configurations of alkaline electrolysis stack are compared through 3-D modelling and experimental fabrication. At first, two different single cell alkaline electrolysers are designed using SolidWorks as a design software and the designed cell has been fabricated using an in-house 3D printer, to avoid post machining processes.
ESC is being used widely in the semiconductor processes such as ion implantation, plasma etch, thin film deposition, lithography and inspection. FIGURE 1. Aluminum mono-polar and polyimide bi-polar chucks. In this particular case an ESC is used to handle solar wafers (156mm square by 150um thick) at 2,400 wafers per hour throughput.
21 de ene. de 2022 · For example, a bipolar electrostatic chuck was created by stacking two monopolar electrostatic chucks, each having beam assemblies, by a wet etching process . Integrated bipolar electrostatic chucks were created by the dry etching process of an integrated three-layer (conductor–insulator–conductor) structure [ 15 ] and additive manufacturing of conductive and nonconductive materials ...
Shigeki Saito. This paper describes the development of bipolar electrostatic chucks with a compliant beam-array structure using abrasive water jet technology. The chucks are cut out from 3D ...
Bipolare Störung ist die etablierte Kurzbezeichnung für bipolare affektive Störung (BAS). Bei der BAS handelt es sich um eine psychische Erkrankung, die zu den Stimmungsstörungen (Affektstörungen) gehört.. Die Krankheit zeigt sich durch extreme, zweipolig entgegengesetzte (= bipolare) Schwankungen, die Stimmung, Antrieb, Denken, Handeln und Aktivitätslevel betreffen.
ESC. Bipolar, J-R Type Electrostatic Chuck 에서의 Discharge 원리가 궁금합니다. 안녕하세요. 반도체 관련 연구를 진행하고 있는 과정에 궁금한 부분이 있어서 글을 남기게 되었습니다. 아시는 바와 같이 J-R Type ESC는 강한 Chucking Force 대비 Process 진행 후 ESC Surface에 Residual Charge ...
