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Type of chuck is characterized by the dielectric material and the resulting mechanism of force generation. Chucks can be either monopolar or bipolar. Slab-type or pin-type based on the surface characteristics. A pin-type chuck is proposed to minimize the effects of particles.
24 de nov. de 2003 · Clamping and residual clamping forces of a Johnsen–Rahbek-type (JR-type) bipolar electrostatic chuck (ESC), which has electrically independent dual electrodes, were measured. Area ratios of the ESC’s two electrodes ranged from 1 to 4.6.
3 de mar. de 2017 · This paper establishes an equivalent circuit model for a bipolar electrostatic chuck containing distributed embosses on dielectric layer surface, and deduces a unified form of mathematical expression describing decaying force, which can cover the two types. The obtained equations can also predict steady force in working state.
This paper describes the development of bipolar electrostatic chucks with a compliant beam-array structure using abrasive water jet technology. The chucks are cut out from 3D-printed composite-laminated plates and the attractive forces that they generate are measured.
12 de feb. de 2018 · This paper establishes an equivalent circuit model for a bipolar electrostatic chuck containing distributed embosses on dielectric layer surface, and deduces a unified form of mathematical expression describing decaying force, which can cover the two types. The obtained equations can also predict steady force in working state.
We use Comsol Multiphysics, a finite element simulation tool to study a bipolar electrostatic chuck (E-chuck). The influences of the substrate and dielectric ty.
Overview. Electrostatic chucks use the attraction of opposite charges to hold both insulating and conducting substrates for a variety of microfabrication processes. These processes include lithography, ion implantation, plasma etch, film deposition, and inspection.
